Heaters

  • System
  • Specifications
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System

TSST provides custom heating solutions, based on three different heating methods: resistive, radiative and laser heating. For each specific application, given the requirements, such as sample size, temperature range, gas environment, the most suitable method will be used to provide an optimum solution. Apart from the heater, the manipulator is an integral part of this solution. Also here, a large range of solutions exists, with systems with up to 5 degrees of freedom.

Resistive heating
A robust, flexible, low cost solution suitable for most applications. A resistive heating system consists of separate, easily exchangeable resistive heaters which are loaded on a heater holder with power contacts and thermocouple. Samples are glued or clamped onto the heater.

Radiative heating
The preferred solution when high temperatures are required combined with larger substrate sizes. In a radiative heating design the heater itself is fixed on a stage in the vacuum chamber. Samples are glued or clamped on a sample plate and loaded onto the heater.

Laser heating
Highest temperatures, fast ramp rates and lowest vacuum contamination. With an infrared laser a sample plate loaded on a sample plate holder is radiated locally, reducing any unintentional outgassing. A laser heating setup is easily combined with resistive heating. This system is only available for smaller substrate sizes.

Specifications

Typical Heater Specifications (*optional)

Resistive Heating

  • Temperature
  • Up to 9500C
  • Sample size
  • <1" substrates
  • Sample fixation
  • Glue, clamping
  • Sample transfer
  • Whole heater
  • Compatible stage
  • Options for full range motions (X,Y,Z, tilt, azimuth), shutter
  • RHEED compatible
  • Yes, with full motion stage and software
  • Gas environment compatibility
  • UHV to high pressure oxygen
  • Temperature readout
  • Thermocouple, pyrometer*
  • Temperature control electronics include PID controller and power supply

Radiative Heating

  • Temperature
  • Up to 10000C
  • Sample size
  • <2" substrates
  • Sample fixation
  • Glue, clamping
  • Sample transfer
  • Sample holder
  • Compatible stage
  • Options for full range motions (X,Y,Z, tilt, azimuth), shutter
  • RHEED compatible
  • Yes, with full motion stage and software
  • Gas environment compatibility
  • UHV to high pressure oxygen
  • Temperature readout
  • Pyrometer
  • Temperature control electronics include PID controller and power supply

Laser Heating

  • Temperature
  • Up to 11000C
  • Sample size
  • <10x10mm substrates
  • Sample fixation
  • Glue, clamping
  • Sample transfer
  • Sample holder
  • Compatible stage
  • Options for full range motions (X,Y,Z, tilt, azimuth), shutter
  • RHEED compatible
  • Yes, with full motion stage and software
  • Gas environment compatibility
  • UHV to high pressure oxygen
  • Temperature readout
  • Pyrometer
  • Temperature control electronics include PID controller and power supply

Combined Heating Solutions

  • Laser heating can be combined with resistive heating where the resistive heater and the sample holder for laser heating can be interchanged

TSST Temperature Control Software

  • Automated PID temperature control, fixed output to stabilize magnetic fluctuations for optimal RHEED measurements

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