Target Stages

  • System
  • Specifications

System

Compared to other deposition techniques PLD excels in its flexibility and ease in which heterostructures can be grown. This is based on the straightforward ablation technique in combination with a system design in which several target materials can be loaded onto a target carrousel. TSST offers custom solutions for target stage designs based on a scanning or spinning motion of the targets, necessary to prevent drilling of the laser beam into the target. Both designs may hold up to six targets and can be equipped with shielding to prevent cross contamination between the targets.

Target spinning stage

A spinning target stage geometry uses spinning (rotation about the normal) and includes (automated) quick and accurate target selection. Typically six 1” targets or three 2” targets can be loaded. When the system is equipped with a loadlock, the full target carrousel can be transferred.

Target scanning stage

For the scanning stage geometry, the target carrousel is mounted onto an XYZ-manipulator, which moves in a zigzag pattern to constantly change the position where the laser hits the target. It is equipped with an automated quick and accurate target selection. Various scanning patterns can be set by the software to also allow efficient ablation of odd-shaped targets. Depending on the preferred design the whole carrousel or individual targets can be transferred to the loadlock.

Specifications

Target spinning stage

  • Movement
  • Spinning, Z
  • Amount of targets
  • Up to 6
  • Targetsize
  • Up to 1", 2"
  • Transfer
  • Whole carrousel, individual

Target scanning stage

Target-scanning-stage
  • Movement
  • X,Y,Z, scanning stage
  • Amount of targets
  • Up to 6
  • Targetsize
  • Odd shaped up to 1", 2"
  • Transfer
  • Individual or whole carrousel