- First TSST- system in Latvia
- One beamline for two systems
- One system made compatible for corrosive gases
- Shared optics with 2 other TSST systems
- Prepared for future connection to RHEED, AES probe and Desa probe
University of Waterloo, Canada (January 2020)
- 2 inch radiation heating compatible with Omicron wafer holders
- Equipped with RHEED
Indian Institute of Science Education and Research (IISER), India (December 2019)
- Dual shutter for combinatorial PLD studies
National University of Singapore, Singapore (October 2019)
- Laser chemical vapor deposition system
- Connected to a Coherent eximer laser setup
- Handling of up to 10×10 mm substrates
Harbin Institute of Technology Shenzhen Graduate School, China (August 2019)
- PLD-RHEED system
- Scanning target stage opposite a resistive heater stage
- Vertical setup
Registrar Institute of Physics, India (July 2019)
- First in India
- PLD-RHEED system
- Connected to beamline
- Bake out table, prepared for UHV
- An elaborate multi-chamber PLD tool
- Consisting of two PLD systems connected to one extensive optical setup
- The two systems share a single laser
Nanjing University, China (April 2019)
In April we installed a PLD system at the Nanjing University of Science and Technology in Nanjing, China. The PLD system is equipped with our resistive/laser heating combination stage and a spinning target stage. The system is prepared for RHEED analysis equipment. Furthermore we gave our user training to familiarise the people involved with the system, and we wish them all the best and hopefully some great scientific results with the system!
Leibniz Institute of Photonic Technology (IPHT), Germany (April 2019)
In April we installed a PLD system at the Leibniz Institute of Photonic Technology in Jena, Germany. The system features a specially requested additional pressure gauge to allow for better precision measurements at higher anneal pressures. After a successful installation the users were made familiar with controlling the system. We wish them all the best in their scientific endeavors.
University of Oxford, United Kingdom (April 2019)
In April we installed the second PLD system for the Department of Materials at the University of Oxford. We attached the system to our already present optical setup in which we expanded upon our optics interlocks solution and implemented a motorized attenuator for better tuning of the laser power for both their systems. A custom-made glovebox for clean loading and unloading of substrates and target materials was delivered with the system. The system itself was implemented with a laser beam scanning option, which in combination with a rotating substrate and a scanning target option allows for upscaling of the substrates to 2-inch wafers. A sputter source with both RF and DC power supplies was added to the system to allow metal deposition, which enables the user to fully finish their devices in-situ. An elaborate training covering all aspects of the system was given to the new students, whom we of course wish all the best in their scientific endeavors.
Georgia Institute of Technology (GeorgiaTech), Atlanta, United States (April 2019)
Recently we have installed a PLD-RHEED system at GeorgiaTech. The system is equipped with automized and programmable shutters between target and substrate for all sorts of combinatorial PLD thin film growth studies. The system includes a resistive heating stage and is prepared for a future upgrade to accommodate laser heating. The spinning target stage allows the use of up to 2” targets. We would like to thank everybody at GeorgiaTech for making this installation a success. We wish them all the best in their upcoming scientific endeavors and will always remain available for service and support!
XUV Optics group, University of Twente, The Netherlands (March 2019)
In the first months of this year we have been extensively working on the installation of a customised, prepared for double beam combinatorial PLD system at the XUV optics group at the University of Twente. The system design allows two seperate beams to enter the system, and combine two ablation plumes with a programmable movable mask between targets and substrate, for all sorts of combinatorial PLD thin film growth studies. We will be closely monitoring their interesting scientific endeavours, and are always ready for service and support!
Zhejiang University, Hangzhou, China (February 2019)
In February we have installed an extensive cluster tool including a PLD-RHEED system and seperate MBE E-beam evaporator chamber at the Zhejiang University in Hangzhou, China, similar to an existing cluster system we installed in December 2016. A redesigned target carousel loading mechanism on the scanning target stage serves improved handling and loading and accurate topics alignment on the targets. Furthermore the system is equipped with a combined resistive/laser heating setup and RHEED. Next to the E-beam evaporator the MBE chamber is equipped with a custom designed water cooled sample stage. Additional ports for future upgrade to utilize K-cells are fitted as well. The system utilizes a loadlock for sample transfer between the PLD and MBE chambers but also offers the storage of different sample holders and heaters. Finally a training was performed to inform the already well know students about new features in the hardware and software.
University of Electronic Science and Technology of China (UESTC), China (September 2018)
In September we completed the installation of a PLD-RHEED system at the University of Electronic Science and Technology of China. In the near future it will be connected to a third-party transfer line to accommodate the in-vacuum transfer of flag style sample plates between our PLD system and an XPS system. Next to that, there is a second home build PLD system connected to our optical setup for which we have supplied a new heater and target stage. Furthermore, an extensive training was performed to familiarize the group with the system and PLD in general. We would like to thank everybody involved and wish them all the best with their scientific efforts.
Sun Yat-sen University (SYSU), China (September 2018)
In September we completed the installation of an elaborate multi-chamber PLD tool at the Sun Yat-Sen University in Guangzhou, China, consisting of thee PLD systems connected to one extensive optical setup. The full tool offers the possibility for performing a wide range of thin film research, as the three systems differ in complexity. The first system is equipped with a manually controlled resistive heating stage solution. The second system is fitted with a fully automated resistive heating stage and a RHEED setup. The third system is equipped with a fully motorized resistive/laser heating combination and is also fitted with a RHEED setup. All systems are equipped with our fully automated target scanning stage solution and a load-lock for sample and target carousel transfer. The three chamber designs are prepared for a wide variety of future upgrades. The three systems share a single laser with a uniquely designed optical setup which allows accurate alignment of the imaging optics to obtain well-defined, highly controllable and reproducible ablation conditions for all three systems. Furthermore, the optical setup is equipped with all necessary optical components to allow quick and easy switching between experiments on the different systems. A highly unique and versatile PLD tool!
Ningbo Institute of Materials Technology & Engineering (NIMTE), China (September 2018)
In September we completed the installation of a PLD-RHEED system at the Ningbo Institute of Materials Technology & Engineering. This is our first system to be equipped with a direct current heating option, alongside our well known resistive and laser heating options. It is connected to a third-party distribution chamber to accommodate the in-vacuum transfer of samples between our PLD system, an MBE system and an XPS system. The bake-out tent which is included with the system allows for easy baking procedures which in combination with the turbo pump, ion getter pump and titanium sublimation pump provides ultra-high vacuum. Our standard optical setup is installed with a laser beam attenuator and laser energy meter to achieve precise tuning of the laser energy which enters the system.
After a successful installation the group received extensive training in the use of our PLD equipment. We wish them good luck in their scientific endeavors and look forward to seeing great results.
Shanghai Institute of Ceramics (SICCAS), China (September 2018)
In September we completed the installation of a PLD-RHEED system at the Shanghai Institute of Ceramics. Furthermore, an extensive training was performed to familiarize the group with the system and PLD in general. We would like to thank everybody involved and wish them all the best with their scientific efforts.
IPEN – CNEN, Brazil (August 2018)
In August we finished the installation of our very first PLD system in Latin America at the Nuclear and Energy Research Institute in Sao Paulo, Brazil. This system is one of the first to be equipped with our newly upgraded silicon carbide radiative heater. The group received an extensive training on how to use the system and was familiarized with the different aspects of pulsed laser deposition. We wish them all the best in their upcoming scientific endeavors.
Czech Technical University (CTU), Czech Republic (July 2018)
Mid July we finished the installation and user training of a PLD system at the Czech Technical University (CTU) in Prague, Czech Republic. A unique feature of this system is the use of a Coherent Compex 50 excimer laser, the smaller brother of the 100 series, for ablation. By the use of our extensive optical path we have integrated the possibility of controlling a wide fluence range and the possibility to perform thin film growth studies on both ceramics and metals. Furthermore the system is able to handle samples up to two inch. We wish them all the best with their research!
National Center for Nanoscience and Technology, China (April 2018)
In April we installed a PLD system at the National Center for Nanoscience and Technology in Beijing. We trained and familiarized an eager group with PLD in general and the specifications of the system, and we wish them all the best with their scientific endeavors!
CNRS de Caen (February 2018)
In February we finalized the installation of an advanced cluster PLD-RHEED and DC/RF Sputter system at the GREYC Laboratory (ENSICAEN) in Caen. The system utilizes a loadlock for sample transfer between the PLD and Sputter sections but also offers the storage of different sample holders and heaters. A custom optics enclosure was designed to connect their current PLD system allowing the use of the same UV laser. Furthermore an extensive training was performed allowing the users to start growing materials from the get go. We would like to thank everybody involved and wish them all the best with their scientific efforts!
University of Strasbourg – ICube (February 2018)
In the beginning of February we shipped and installed a PLD system at the ICube laboratory at the university of Strasbourg. The PLD system was connected to an existing laser setup, where we used our and the customers expertise for thorough optics and system alignment. Furthermore we gave our user training to familiarise the people involved with the system, and we wish them all the best and hopefully some great scientific results with the system!
University of Leeds (December 2017)
In December we finished the shipment and installation of an advanced PLD system at the University of Leeds. It concerns an extensive PLD-RHEED system with a bake out enclosure and a silicon carbide heater. The system will be part of a complex cluster setup to be finalised in the upcoming year. In January we went back to give our extensive user training to familiarise the group with the system and PLD in general. We would like to thank everybody involved and wish them all the best with their scientific efforts, we will always remain available for service and support!
University of Groningen (June 2017)
Recently we have finalised the installation of an extensive PLD-RHEED system in the Nanostructures of Functional Oxides group at the University of Groningen, their second TSST PLD system! As one of our first customers we greatly value their appreciation of our systems and service and we hope to continue this fruitfull collaboration in many years to come.
University of Oxford (Februari 2017)
In februari we finalised the installation of a PLD system at the department of materials at the University of Oxford. The system is equipped with a unique custom designed safety interlock system on the optical shielding. This allows users to work without the otherwise necessary safety glasses, a very useful solution in a busy and well equipped lab. Furthermore we trained a great and eager group of people involved in the project and we will stay in close touch for service and support.
Huazhong University of Science and Technology, China (December 2016)
We have finalized the installation of an extensive PLD-RHEED system at the Huazhong University of Science and Technology (HUST). Furthermore we gave a training to the users to familiarize themselves with the general aspects of film growth using RHEED.
Zhejiang University, China (December 2016)
We have finalized the installation of a cluster PLD-RHEED system with our unique combined laser and resistive heating solution including loadlock and MBE chamber with E-beam evaporator and K-cell, including training.
University of Tennessee, USA (October 2016)
We finished a project with the University of Tennessee, Knoxville USA, concerning an extensive UHV PLD-RHEED system, with a combined laser and resistive heating system.